Exhaust gas cleaner

The exhaust gas cleaner is an equipment that purges the exhaust gas of epitaxial growth reactors, made by IPRS Băneasa [1].

The I.P.R.S. Băneasa Full Line Condensed Catalog (1990) explains that the exhaust is a highly explosive mixture of hydrochloric acid, hydrogen and silicon tetrachloride, and that the process consists of hydrogen neutralisation and silicon tetrachloride hydrolysation [1]. The equipment has a metal frame with protection covers, a cleaning chamber with PVC pellets, water and clean gas outlets, nitrogen and exhaust gas inlets, nozzles for water admission into the chamber, a differential pressure regulator and flowmeter for nitrogen, and a visiting window [1].

The catalog gives dimensions of 600 × 600 × 2100 mm, a weight of 210 kg, a water pressure range of 0.7…2 atm and a nitrogen supply of 0…0.25 c.m.h. (as printed) [1]. Its drawing, with the nitrogen inlet, metal frame, level indicator, differential pressure indicator, cleaning chamber, collector chamber, gas inlet, visiting window and exit numbered, is in the Gallery [1].