Silicon wafer automatic loading system

The silicon wafer automatic loading system loads and unloads silicon wafer carriers into and out of an oven (diffusion, oxidation etc.) at a regulated and constant speed; it was made by IPRS Băneasa [1].

The I.P.R.S. Băneasa Full Line Condensed Catalog (1990) describes its operation: when the start button (RUN) is switched on in the „Automat” mode, the carrier is kept at the oven entrance for a period of 0 to 9 min preset by a „pre-heating” clock; another clock (1–99 min or 10–990 min) starts immediately after the carrier enters the oven, and after the heating time has elapsed the carrier is kept at the oven entrance again for a period equal to the „pre-heating”; the end of the sequence is signalled acoustically and optically (the READY signal) [1].

The catalog gives dimensions of 1500 × 300 × 120 mm, a weight of 20 kg and a power supply of 0.1 kW [1]. The drawing of its control panel, in the Gallery, is labelled in English and Romanian (speed and time settings for IN and OUT, the WAIT IN, RUN, SOAK and WAIT OUT lamps, the MAN/AUT switch) [1].